EUV multilayer collector
1. Multilayers for 13.5 nm
- Model：
1. Multilayers for 13.5 nm
2.Broadband Multilayers for 12.5 … 16.0 nm
3. Schwarzschild objective for 13.5 nm
| 20x | 10x | |
| Magnification | 21.34 | 9.8 |
| NA | 0.2 | 0.44 |
| Focal length | 26.95 | 53.06 |
| λ | 13.5nm | 13.5nm |
| Primary mirrorー１ | ||
| R | 100mm | 140mm |
| Dia. | 52mm | 106mm |
| Secundary mirrorー２ | ||
| R | -35mm | -175mm |
| Dia. | 11mm | 48mm |